BME6363: BioMEMS Design and Applications

The emphasis of this module is on applications and design of Micro Electro- Mechanical Systems (MEMS) devices for Biomedical and related applications. MEMS fabrication techniques and processes are covered. Membranes and cantilevers used for sensing and actuation and how geometry affects their sensitivity and structural response must be studied. The course will conclude with an introduction to microfluidics and its application to biotechnology.